Your Source For Thin Film Process Solutions!
Attention Re: The European Chips Act
The EU has committed 43 billion euros ($47 billion) in public and private investment into European semiconductor manufacturing to boost European semiconductor manufacturing and reduce dependency on foreign semiconductor production to alleviate strain on the semiconductor supply chain.
High-Field Vacuum And Conventional Anneal Solutions
Yokohama based Futek Furnace designs & manufactures a broad range of MVAO (magnetic vacuum annealing oven) stand-alone annealing ovens and magnetizers for both R&D and production applications, specializing in tools for magnetic, ferroelectric, piezoelectric and spintronic device fabrication Futek Furnace supports customers in the data storage, sensor, MEMS and spintronics markets worldwide.
High Volume Manufacturing
Systems
High Volume Manufacturing (HVM) Systems provide the highest throughput via a 50-100 X 200/300mm wafer batch. The HVM systems are in wide use within the data storage and spintronics markets worldwide.
BL-12 Large Batch Conventional Anneal Oven w/ or w/o Magnetizer
The BL-12 Large Batch Anneal Oven can be utilized as a stand-alone anneal oven for 200/300mm wafer anneal or it can be paired with a 1.2 to 2.0 Tesla magnetizer for processing a broad range of magnetic thin film materials and devices including MRAM.
Low-field MVAO Systems
Low-field MVAO Systems provide fields from 2000 oe to <1.0 Tesla employing either a fixed field permanent magnet or a variable field electro-magnet. The systems provide a board range of thermal control, high vacuum and automated 200-300 mm wafer handling. Low-fied systems are in wide us in the data storage industry.
High-field MVAO Systems
High-field MVAO Systems provide fields from 1.0 to 2.0 Tesla employing either a fixed filed permanent magnet or a variable field superconducting magnet. These systems provide a board range of thermal control, high vacuum and automated 200-300 mm wafer handling. High-field systems are in wide use in the data storage and spintronics industries.
Ultra-high-field MVAO Systems
Ultra-high-field MVAO Systems provide fields >2.0 Tesla employing a variable field superconducting magnet. The systems provide a board range of thermal control, high vacuum and automated 200-300 mm wafer handling. Ulta-high-field systems are in wide use in the data storage and spintronic industries.
R&D MVAO Systems
R&D MVAO Systems are available to meet a broad range of research and development applications. Fields can range from 2000 oe to 10.0 Tesla. Process temperatures can from 150 deg. C. to 600 deg. C.. Fixturing for substrates from coupon sized to 300mm wafers is available. R&D systems are in wide use in university, govenment and industrial R&D labs.